Defect inspection system
Who already wins at this buyer
Firms with recorded awards from VTT Technical Research Centre of Finland Ltd in this tender’s CPV categories — the incumbents you are bidding against.
| Firm | Wins | Awarded | Last win |
|---|---|---|---|
| Iin Konepaja Oy | 2 | €337,310 | 2026-09-07 |
| Sales Department | 1 | €1,256,300 | 2026-09-03 |
| FRT GmbH | 1 | €464,674 | 2026-08-31 |
| Concept Scientific Instruments | 1 | €177,100 | 2026-09-14 |
Full buyer profile: what VTT Technical Research Centre of Finland Ltd buys and who wins it →
CPV codes
38000000 Laboratory, optical & precision equipmentDescription
VTT is looking to acquire an automated defect inspection tool for 200 mm and 300 mm patterned wafers. The tool will enable rapid tracking of defects that appear during the manufacturing process of functional devices (in-line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of the patterns that the machine must be able to analyze are silicon oxides and nitrides, polysilicon, metals, and photoresist. The object of the tender process and the technical requirements are described in more detail in the invitation to tender documents.