Ion beam trimmer
TED · 609219-2026Award noticeawardedNo deadline given
Who already wins at this buyer
Firms with recorded awards from VTT Technical Research Centre of Finland Ltd in this tender’s CPV categories — the incumbents you are bidding against.
| Firm | Wins | Awarded | Last win |
|---|---|---|---|
| FRT GmbH | 1 | €464,674 | 2026-08-31 |
| Iin Konepaja Oy | 1 | — | 2026-06-19 |
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CPV codes
38000000 Laboratory, optical & precision equipmentDescription
The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.
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