Electron Beam Lithography (EBL) Tool
Value
Estimated€2,294,590 · 26,000,000 SEK
Awarded—
Who already wins at this buyer
Firms with recorded awards from Lunds universitet in this tender’s CPV categories — the incumbents you are bidding against.
| Firm | Wins | Awarded | Last win |
|---|---|---|---|
| AIXTRON Ltd. | 3 | €8,534,459 | 2026-06-29 |
| Scienta Omicron | 2 | €180,253 | 2026-07-06 |
| FEI EUROPE BV | 1 | €2,382,844 | 2026-10-05 |
| Bergman Labora AB | 1 | €661,298 | 2026-09-11 |
| Oxford Nanopore Technologies | 1 | €498,708 | 2026-07-16 |
Full buyer profile: what Lunds universitet buys and who wins it →
CPV codes
38000000 Laboratory, optical & precision equipmentDescription
Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.
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