Advanced Lithography EUV Scanner
TED · 357867-2026Award noticeNo deadline given
Buyer
Name—
CountryBE
Published2026-05-26
Deadline—
Value
Estimated—
Awarded€0 · 0 EUR
CPV codes
38000000 Laboratory, optical & precision equipmentDescription
The Low NA scanner is a state-of-the-art EUV scanner enabling exploration and further expansion of the EUV patterning, using exploratory materials and novel designs, in the logic and memory devices. Next to the resolution the low NA-scanner can give the improved overlay performance and throughput are crucial for the continuous evolving semiconductor devices.
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