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Advanced Lithography EUV Scanner

TED · 357867-2026can-standardNo deadline given

Buyer

Name

CountryBE

Published2026-05-26

Deadline

Value

Estimated

Awarded€0 · 0 EUR

CPV codes

38000000 Laboratory, optical & precision equipment

Description

The Low NA scanner is a state-of-the-art EUV scanner enabling exploration and further expansion of the EUV patterning, using exploratory materials and novel designs, in the logic and memory devices. Next to the resolution the low NA-scanner can give the improved overlay performance and throughput are crucial for the continuous evolving semiconductor devices.

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Source

View the official notice on TED