Plasma Ashing System
TED · 737361-2026Award noticeNo deadline given
Buyer
NameWalther-Meissner-Institut der Bayerischen Akademie der Wissenschaften
CountryDE
Published2026-10-26
Deadline—
Value
Estimated—
Awarded—
CPV codes
38000000 Laboratory, optical & precision equipmentDescription
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection.
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