Automated TEM Analysis Platform
TED · 679782-2026Award noticeNo deadline given
Buyer
Name—
CountryBE
Published2026-10-02
Deadline—
Value
Estimated—
Awarded€0 · 0 EUR
CPV codes
38000000 Laboratory, optical & precision equipmentDescription
The object of this tender is the supply and commissioning of 2 300 mm full wafer automated TEM sample preparation tool. Both tools should be able to load 300mm wafers and allow for high-accurate automate TEM sample preparation. Both tools should be able to do full automated sample preparation of quality and ultra-thin samples (sub 20nm). Automated end-pointing of the TEM sample needs to be precise within nanometer range on a specific structure. In-system gas injection for carbon, TEOS and tungsten deposition is required.
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