300 mm BEOL large field exposure system, fully automated (IZM-132) - PR1184859-3460-P
TED · 762595-2026Award noticeNo deadline given
Buyer
Name—
CountryDE
Published2026-11-03
Deadline—
Value
Estimated—
Awarded—
CPV codes
31712100 Electrical machinery & lightingDescription
300 mm BEOL large field exposure system, fully automated (IZM-132)
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